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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isap:329195356
prov:wasDerivedFrom
isa:439063895
Subject Item
isa:439063895
rdf:type
prov:Entity
prov:value
A protective layer 28 of a material such as borophosphosilicate glass (BPSG), phosphosilicate glass (PSG), borosilicate glass (BSG), or silicon dioxide has been formed over the device 20 by chemical vapor deposition (CVD) or other suitable means.
prov:wasQuotedFrom
n5:com
Subject Item
isap:457733979
prov:wasDerivedFrom
isa:439063895
Subject Item
isap:46371071
prov:wasDerivedFrom
isa:439063895
Subject Item
isap:331174944
prov:wasDerivedFrom
isa:439063895