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PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:441048310
rdf:type
prov:Entity
prov:value
Thus, the substrate is exposed to a pre-clean or other etching process, such as an argon/hydrogen etch process to remove a portion of the barrier layer formed on the horizontal surfaces of the patterned feature, i.e, the bottom of the via 210 at the interface with the underlying metal layer 206, the bottom of the trench 212, and the field surface 214, as shown in FIG. 4.
prov:wasQuotedFrom
n4:com
Subject Item
isap:27055237
prov:wasDerivedFrom
isa:441048310