This HTML5 document contains 4 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:52125109
rdf:type
prov:Entity
prov:value
The thusly fabricated semiconductor device capacitor serves to obtain an increased effective area therein in comparison to the conventional semiconductor device as shown in FIG. 1 as well as a high dielectric constant by applying Ta2 O5 to a dielectric film and a refractory metal such as W in forming a lower electrode.
prov:wasQuotedFrom
n5:fr
Subject Item
isap:131315630
prov:wasDerivedFrom
isa:52125109