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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:60316480
rdf:type
prov:Entity
prov:value
The method of the invention provides (1) the ability to micromachine devices on SOI substrates without design constraints for structure spacing; etch gaps, oxide thickness or other features, and (2) a flexibility for handle wafer type and bonding process.
prov:wasQuotedFrom
n5:com
Subject Item
isap:235795027
prov:wasDerivedFrom
isa:60316480