This HTML5 document contains 4 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:61367390
rdf:type
prov:Entity
prov:value
The structure of FIG. 50 is similar to that of FIG. 49 except that the fourth-layer interconnection 13L (BP) is formed of the thick conductor film 13L2 made of an Al base material and the thin conductor film 13L1 formed from a high-melting point metal or metal compound such as TiN or W. This structure brings about a further improvement in the reliability.
prov:wasQuotedFrom
n5:com
Subject Item
isap:331534259
prov:wasDerivedFrom
isa:61367390