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PrefixNamespace IRI
n5google.com.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:68268096
rdf:type
prov:Entity
prov:value
The PZT film 18 is then coated with another layer 19 of conductive material, such as aluminum, nickel, chromium, platinum or ITO, and, as illustrated in FIG. 1(d), a photoresist layer 20 is coated on the conductive layer and then exposed to ultraviolet rays 21 through a mask 22 and developed to produce hardened regions 23.
prov:wasQuotedFrom
n5:au
Subject Item
isap:59901029
prov:wasDerivedFrom
isa:68268096