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PrefixNamespace IRI
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
n4docstoc.
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:72826098
rdf:type
prov:Entity
prov:value
This solution may be spin coated onto a substrate such as a silicon wafer or metal sheet, the coated substrate baked to remove the solvent followed by exposure through a mask to selectively expose the resist film. Those portions of the resist
prov:wasQuotedFrom
n4:com
Subject Item
isap:338820908
prov:wasDerivedFrom
isa:72826098
Subject Item
isap:337963166
prov:wasDerivedFrom
isa:72826098