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provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
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rdf:type
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For example, the structure being formed may be part of various devices or circuits, such as SRAMs, DRAMs, flat panel displays, any structure formed with the use of resist material, etc.
prov:wasQuotedFrom
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