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PrefixNamespace IRI
n4google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:83659896
rdf:type
prov:Entity
prov:value
As circuit densities increase, the widths of contacts, vias, lines and other features, as well as the dielectric materials between them, may be decreased to less than about 65 nm, whereas the thickness of the dielectric layers remains substantially constant with the result that the aspect ratios for the features, i.e., their height divided by width, increase.
prov:wasQuotedFrom
n4:es
Subject Item
isap:2224983
prov:wasDerivedFrom
isa:83659896
Subject Item
isap:4873874
prov:wasDerivedFrom
isa:83659896