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PrefixNamespace IRI
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
n5patents.
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:8798476
rdf:type
prov:Entity
prov:value
A metal such as tantalum (Ta), titanium (Ti), niobium (Nb), tungsten (W), ruthenium (Ru), and rhodium (Rh), an alloy including thereof, chemical compounds thereof, or a laminated film thereof may be used
prov:wasQuotedFrom
n5:com
Subject Item
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isa:8798476
Subject Item
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Subject Item
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isa:8798476
Subject Item
isap:464583847
prov:wasDerivedFrom
isa:8798476
Subject Item
isap:464982474
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Subject Item
isap:464635629
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isa:8798476