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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:99475110
rdf:type
prov:Entity
prov:value
Deposition of a hydrophobic lining layer has a surprising and unexpected result of converting subsequent hydrophilic layers to hydrophobic layers. [0078] The process gases for the gap filling layer 302 are preferably SiH4, CH3SiH3, or (CH3)2SiH2 and 50 wt % of hydrogen peroxide (H2O2) which is vaporized and mixed with an inert carrier gas, such as helium.
prov:wasQuotedFrom
n5:com
Subject Item
isap:404614576
prov:wasDerivedFrom
isa:99475110