<http://webisa.webdatacommons.org/prov/45356708>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/100326206> .
<http://webisa.webdatacommons.org/100326206>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/100326206>	<http://www.w3.org/ns/prov#value>	"A dielectric material, such as silicon dioxide, silicon nitride or silicon oxynitride, is deposited to fill the trenches." .
<http://webisa.webdatacommons.org/prov/283706123>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/100326206> .
<http://webisa.webdatacommons.org/prov/44841580>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/100326206> .
<http://webisa.webdatacommons.org/100326206>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .