<http://webisa.webdatacommons.org/101368573>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/101368573>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/101368573>	<http://www.w3.org/ns/prov#value>	"The sputter-etching is effectively carried out with gases such as oxygen, nitrogen, argon, krypton, and xenon." .
<http://webisa.webdatacommons.org/prov/324463258>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/101368573> .