<http://webisa.webdatacommons.org/102003080>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/102003080>	<http://www.w3.org/ns/prov#value>	"An alkaline organic solvent or the like has a limited number of types of thin films to be etched because a metal material such as Al may be etched or corroded." .
<http://webisa.webdatacommons.org/prov/141126717>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/102003080> .
<http://webisa.webdatacommons.org/102003080>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .