<http://webisa.webdatacommons.org/prov/283706121>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/102494020> .
<http://webisa.webdatacommons.org/102494020>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/102494020>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/102494020>	<http://www.w3.org/ns/prov#value>	"Alternatively, etch stop layer 16 may also be another material, such as boronitride or silicon oxynitride." .