<http://webisa.webdatacommons.org/102618621>	<http://www.w3.org/ns/prov#value>	"A micro mirror array is a device were a large number of small reflecting surfaces have been fabricated on a larger substrate with the normals of the micro mirror surfaces oriented at an angle with respect to the normal of the substrate surface." .
<http://webisa.webdatacommons.org/prov/397954191>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/102618621> .
<http://webisa.webdatacommons.org/102618621>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/102618621>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.fr> .