<http://webisa.webdatacommons.org/102652311>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/102652311>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/349522572>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/102652311> .
<http://webisa.webdatacommons.org/prov/213362717>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/102652311> .
<http://webisa.webdatacommons.org/prov/281611026>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/102652311> .
<http://webisa.webdatacommons.org/102652311>	<http://www.w3.org/ns/prov#value>	"A method according to claim 1, wherein, in the first stage, silicon is used as a target and a gas including a noble gas and hydrogen is used as a sputtering gas." .
<http://webisa.webdatacommons.org/prov/483118949>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/102652311> .