<http://webisa.webdatacommons.org/102887756>	<http://www.w3.org/ns/prov#value>	"FIG. 13A is a plan view showing the wafer stage of FIG. 11." .
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<http://webisa.webdatacommons.org/prov/250249874>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/102887756> .
<http://webisa.webdatacommons.org/102887756>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .