<http://webisa.webdatacommons.org/102955663>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.ca> .
<http://webisa.webdatacommons.org/102955663>	<http://www.w3.org/ns/prov#value>	"FIG. 2 is a plan view diagram illustrating the components of the interferometer and test chuck assembly of the system shown in FIGS. 1 and 1A." .
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<http://webisa.webdatacommons.org/prov/249871564>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/102955663> .