<http://webisa.webdatacommons.org/103668458>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/103668458>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/464641368>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/103668458> .
<http://webisa.webdatacommons.org/103668458>	<http://www.w3.org/ns/prov#value>	"In addition, although in the preferred embodiment silicon is used as the solid to be selectively grown, another metal such as tungsten (W), aluminum (Al), or a silicide compound may be selectively grown in the same manner described above." .
<http://webisa.webdatacommons.org/prov/131315627>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/103668458> .