<http://webisa.webdatacommons.org/103726279>	<http://www.w3.org/ns/prov#value>	"In this embodiment, at least one gas such as CO2 or a gas mixture that includes CO2 is flowed under pulsing conditions to change deposition on a substrate." .
<http://webisa.webdatacommons.org/103726279>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/508075612>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/103726279> .
<http://webisa.webdatacommons.org/prov/279588457>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/103726279> .
<http://webisa.webdatacommons.org/103726279>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .