<http://webisa.webdatacommons.org/prov/288195952>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/103746714> .
<http://webisa.webdatacommons.org/103746714>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.fr> .
<http://webisa.webdatacommons.org/103746714>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/103746714>	<http://www.w3.org/ns/prov#value>	"In FIGS. 3 and 4, a mirror galvanometer 1 has a triple layer construction with respective planar upper and lower glass substrates 3, 4 (upper and lower insulating substrates) made for example from borosilicate glass and the like, anodic spliced to upper and lower faces of a silicon substrate 2 (semiconductor substrate)." .