<http://webisa.webdatacommons.org/103844203>	<http://www.w3.org/ns/prov#value>	"To help prepare the industry, the iTC seeks to support development of photoresists, fluids and other components required for the high-numerical aperture technology." .
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<http://webisa.webdatacommons.org/103844203>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<electroiq.com> .