<http://webisa.webdatacommons.org/prov/236250359>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/104301995> .
<http://webisa.webdatacommons.org/104301995>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/104301995>	<http://www.w3.org/ns/prov#value>	"However, the fabrication unit shown in FIG. 7 is an example with which three film" .
<http://webisa.webdatacommons.org/104301995>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patents.com> .