<http://webisa.webdatacommons.org/104386645>	<http://www.w3.org/ns/prov#value>	"However, the substrate can also be formed by another material, such as a ceramics wafer, with heater and temperature sensor(s) arranged e.g. as film layers thereon." .
<http://webisa.webdatacommons.org/prov/44773408>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/104386645> .
<http://webisa.webdatacommons.org/104386645>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.ca> .
<http://webisa.webdatacommons.org/104386645>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .