<http://webisa.webdatacommons.org/105272816>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/105272816>	<http://www.w3.org/ns/prov#value>	"oshiji HamataniOriginal AssigneeSemiconductor Energy Laboratory Co., Ltd.Export CitationBiBTeX, EndNote, RefManPatent Citations (100), Non-Patent Citations (44), Referenced by (9), Classifications (51), Legal Events (4) External Links: USPTO, USPTO Assignment, EspacenetThin film transistor; crystal silicon thin film formed on a substrate such as a glass and quartz; containing a metal element which" .
<http://webisa.webdatacommons.org/prov/337149347>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/105272816> .
<http://webisa.webdatacommons.org/105272816>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .