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<http://webisa.webdatacommons.org/106621336>	<http://www.w3.org/ns/prov#value>	"olishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS70869279 Mar 20048 Ago 2006Micron Technology, Inc.Methods and systems for planarizing workpieces, e.g., microelectronic workpiecesUS709469521 Ago 200222 Ago 2006Micron Technology, Inc.Apparatus and method for conditioning a polishing pad used for mechanical and/or chemical-mechanical planarizationUS7" .
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