"Moreover, FIG. 13A is a plan view that shows an example in which the distance d1 is changeable, and FIG. 13B is a cross-sectional view taken along line X???X of FIG. 13A. The distance between the shortest resonator beam 5A among the three resonator beams 5A, 5B and 5C and the corresponding electrode 11A is made shortest, and the distance between the resonator beam 5B having an intermediate length" . . . . .