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<http://webisa.webdatacommons.org/107498513>	<http://www.w3.org/ns/prov#value>	"2Woon-Yong ParkPhotolithography method for fabricating thin filmUS20030071944 *Oct 10, 2002Apr 17, 2003Heum-Il BaekTransflective liquid crystal display device and fabricating method thereofUS20030085404Oct 18, 2002May 8, 2003Dong-Gyu KimGate wire including a gate line, a gate pad, and a gate electrode are formed on substrate; gate insulating layer, a semiconductor layer, and an ohmic contact layer" .