<http://webisa.webdatacommons.org/108844139>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/108844139>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/108844139>	<http://www.w3.org/ns/prov#value>	"A device according to claim 5 wherein said metal silicide is a metal selected from the group comprising Ti, Pt, Ru, Re, Mo, Ta and W." .
<http://webisa.webdatacommons.org/prov/357348739>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/108844139> .