<http://webisa.webdatacommons.org/110809401>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/138116287>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/110809401> .
<http://webisa.webdatacommons.org/110809401>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/110809401>	<http://www.w3.org/ns/prov#value>	"The barrier material is formed in such an embodiment using one of the processes including evaporation, deposition, chemical vapor deposition, and-plasma enhanced chemical vapor deposition." .