<http://webisa.webdatacommons.org/110950028>	<http://www.w3.org/ns/prov#value>	"The device is an example of a microelectromechanical system, or a MEMS, which contains tiny moving parts." .
<http://webisa.webdatacommons.org/110950028>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/110950028>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<phys.org> .
<http://webisa.webdatacommons.org/prov/446311465>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/110950028> .