<http://webisa.webdatacommons.org/111087311>	<http://www.w3.org/ns/prov#value>	"A method for manufacturing an electronic device such as an integrated circuit or display device is provided." .
<http://webisa.webdatacommons.org/111087311>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/270972906>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/111087311> .
<http://webisa.webdatacommons.org/prov/396589770>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/111087311> .
<http://webisa.webdatacommons.org/111087311>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .