<http://webisa.webdatacommons.org/111536895>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<elsevier.com> .
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<http://webisa.webdatacommons.org/111536895>	<http://www.w3.org/ns/prov#value>	"In the metal deposition step, a metal, such as Au, Ag, and Pt is deposited on the Si surface usually as nanoparticles (NPs) [4]." .