<http://webisa.webdatacommons.org/112097108>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.de> .
<http://webisa.webdatacommons.org/112097108>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/112097108>	<http://www.w3.org/ns/prov#value>	"Moreover, it is apparent that the gate insulating film 3 may be formed of a material other than the silicon oxide film, for example, a silicon nitride film." .
<http://webisa.webdatacommons.org/prov/455805336>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/112097108> .