<http://webisa.webdatacommons.org/11243460>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/11243460>	<http://www.w3.org/ns/prov#value>	"FIG. 10 is a plan view showing an example of the relative relationship of various kinds of elements inside a vacuum processing apparatus in accordance with the present invention." .
<http://webisa.webdatacommons.org/prov/249871572>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/11243460> .
<http://webisa.webdatacommons.org/11243460>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .