<http://webisa.webdatacommons.org/112523736>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/112523736>	<http://www.w3.org/ns/prov#value>	"Not only silicon and glass, various materials such as metal, plastics, DLC, and so on can be used if they have different inner stress than that of substrate" .
<http://webisa.webdatacommons.org/prov/292035034>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/112523736> .
<http://webisa.webdatacommons.org/prov/374289605>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/112523736> .
<http://webisa.webdatacommons.org/112523736>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<nsti.org> .