<http://webisa.webdatacommons.org/112951606>	<http://www.w3.org/ns/prov#value>	"The trench is formed in a substrate 101 which, for example, is lightly doped with a p-type dopant such as boron (B)." .
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<http://webisa.webdatacommons.org/112951606>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patents.com> .
<http://webisa.webdatacommons.org/112951606>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .