<http://webisa.webdatacommons.org/114360350>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.ca> .
<http://webisa.webdatacommons.org/114360350>	<http://www.w3.org/ns/prov#value>	"Coatings, such as thin coatings used in some anti-reflection coatings can be applied more uniformly to planarized elements." .
<http://webisa.webdatacommons.org/prov/434325970>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/114360350> .
<http://webisa.webdatacommons.org/114360350>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .