<http://webisa.webdatacommons.org/114407900>	<http://www.w3.org/ns/prov#value>	"[0014]Also, a second aspect of the present invention is a resist pattern" .
<http://webisa.webdatacommons.org/114407900>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/114407900>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<faqs.org> .
<http://webisa.webdatacommons.org/prov/26739157>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/114407900> .