<http://webisa.webdatacommons.org/prov/281611023>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/116135923> .
<http://webisa.webdatacommons.org/116135923>	<http://www.w3.org/ns/prov#value>	"the gas introduced to the chamber at the second protection film forming step is gas including nitrogen gas; and the second protection film formed in the second protection film forming step is made of a nitride film. 8." .
<http://webisa.webdatacommons.org/116135923>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/116135923>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .