<http://webisa.webdatacommons.org/116409899>	<http://www.w3.org/ns/prov#value>	"uitable for such electronic devices as integrated circuits where feature sizes are expected to go below 0.25 microns." .
<http://webisa.webdatacommons.org/116409899>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/116409899>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/270972906>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/116409899> .