<http://webisa.webdatacommons.org/116716620>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/116716620>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/116716620>	<http://www.w3.org/ns/prov#value>	"The present invention relates to the field of semiconductor processing, wherein integrated circuits and other devices are formed on a substrate." .
<http://webisa.webdatacommons.org/prov/270972903>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/116716620> .