<http://webisa.webdatacommons.org/117009276>	<http://www.w3.org/ns/prov#value>	"The capacitor upper electrode 116 is made of such a metal as ruthenium, iridium, platinum, palladium, rhodium or rhenium, or a compound thereof." .
<http://webisa.webdatacommons.org/117009276>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/13059316>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/117009276> .
<http://webisa.webdatacommons.org/117009276>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .