<http://webisa.webdatacommons.org/119170043>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/119170043>	<http://www.w3.org/ns/prov#value>	"As a result, the present inventor et al. clarify that each of Ru, Pt, and Ir is a material usable for a storage capacitor electrode material and a copper wiring barrier metal." .
<http://webisa.webdatacommons.org/119170043>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/140489141>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/119170043> .
<http://webisa.webdatacommons.org/prov/140943627>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/119170043> .