<http://webisa.webdatacommons.org/119768877>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/231454684>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/119768877> .
<http://webisa.webdatacommons.org/119768877>	<http://www.w3.org/ns/prov#value>	"However, the restricted pattern such as described above can be measured, but it is impossible to recreate an irregular shape such as discriminating LER on ArF resist." .
<http://webisa.webdatacommons.org/119768877>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .