<http://webisa.webdatacommons.org/120494034>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/120494034>	<http://www.w3.org/ns/prov#value>	"In one embodiment, in which the offset spacer 11 is composed of an oxide, such as silicon oxide, the offset spacer 11 may be formed by thermal oxidation." .
<http://webisa.webdatacommons.org/120494034>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/33646820>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/120494034> .