<http://webisa.webdatacommons.org/120769301>	<http://www.w3.org/ns/prov#value>	"Another object is a method of manufacturing a semiconductor device having an interconnection structure with reduced capacitance and structural integrity." .
<http://webisa.webdatacommons.org/prov/385544766>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/120769301> .
<http://webisa.webdatacommons.org/120769301>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/120769301>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .