<http://webisa.webdatacommons.org/prov/47843939>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/122146843> .
<http://webisa.webdatacommons.org/122146843>	<http://www.w3.org/ns/prov#value>	"In an exemplary embodiment, all surfaces of heater 25 exposed to vacuum chamber 15 are made of a ceramic material, such as aluminum oxide (Al2 O3 or alumina) or aluminum nitride." .
<http://webisa.webdatacommons.org/prov/44841547>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/122146843> .
<http://webisa.webdatacommons.org/122146843>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/122146843>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .