<http://webisa.webdatacommons.org/123072388>	<http://www.w3.org/ns/prov#value>	"As mentioned above, when the mask is disposed above the deposition source, the mask bends due to its weight and as a result, there was a problem of decreasing the dimensional accuracy of a deposition material to be deposited." .
<http://webisa.webdatacommons.org/123072388>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/443481415>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/123072388> .
<http://webisa.webdatacommons.org/123072388>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .